A two-dimensional array of single-hole quantum dots

Quantum dots fabricated using methods compatible with semiconductor manufacturing are promising for quantum information processing. In order to fully utilize the potential of this platform, scaling dot arrays along two dimensions is a key step. Here, we demonstrate two-dimensional array where each tuned single-charge occupancy, verified by simultaneous measurements integrated radio frequency charge sensors. We achieve planar germanium low disorder and small effective mass, allowing incorporation dedicated barrier gates control coupling dots. measure hole filling spectrum show that can tune single-hole from isolated strongly exchange coupled These results motivate use as building blocks simulation computation.